{"total_count":1,"results":[{"id":42809,"original_title":"Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000","title_alternative":null,"title_transcription":"  ","title_alternative_transcription":null,"pub_date":"2001","statement_of_responsibility":"editors, Marc Heyns, Paul Mertens and Marc Meuris","creators":[{"full_name":"International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS)"},{"full_name":"Heyns, Marc"},{"full_name":"Mertens, Paul"},{"full_name":"Meuris, Marc"}],"contributors":[],"publishers":[{"full_name":"Scitec Publications"}],"publication_place":null,"extent":"xiii, 321 p. ; 25 cm","dimensions":null,"identifiers":[{"identifier_type":"isbn","body":"9783908450573"},{"identifier_type":"issn","body":"10120394"}],"subjects":[],"classfifications":[{"classification_type":"udc","term":"548.526"}],"access_address":null,"items":[{"item_identifier":"218743","shelf":"集密書庫8"}],"created_at":"2000-12-26T19:03:04.000+09:00","updated_at":"2025-12-15T09:52:45.976+09:00"}]}