{"total_count":1,"results":[{"id":132419,"original_title":"Chemical physics of thin film deposition processes for micro- and nano-technologies","title_alternative":"Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001","title_transcription":"","title_alternative_transcription":"","pub_date":"2002","statement_of_responsibility":"edited by Yves Pauleau","creators":[{"full_name":"Pauleau, Y."}],"contributors":[],"publishers":[{"full_name":"Kluwer Academic"}],"publication_place":"Dordrecht","extent":"xiii, 363 p. ; 25 cm","dimensions":null,"identifiers":[],"subjects":[],"classfifications":[{"classification_type":"udc","term":"539.216"}],"access_address":null,"items":[{"item_identifier":"602722","shelf":"単行書11"}],"created_at":"2024-01-16T11:19:49.124+09:00","updated_at":"2025-12-15T09:33:01.165+09:00"}]}