{"total_count":1,"results":[{"id":72662,"original_title":"Plasma electronics : applications in microelectronic device fabrication","title_alternative":null,"title_transcription":"  ","title_alternative_transcription":null,"pub_date":"2006","statement_of_responsibility":"by T. Makabe and Z. Petrović","creators":[{"full_name":"真壁, 利明"},{"full_name":"Petrović, Z. (Zoran Lj)"}],"contributors":[],"publishers":[{"full_name":"Taylor \u0026 Francis"}],"publication_place":null,"extent":"339 p. ; 24 cm","dimensions":null,"identifiers":[{"identifier_type":"isbn","body":"9780750309769"}],"subjects":[],"classfifications":[{"classification_type":"udc","term":"539.2"}],"access_address":null,"items":[{"item_identifier":"529978","shelf":"単行書11"}],"created_at":"2006-08-30T22:40:47.000+09:00","updated_at":"2025-12-15T09:32:35.958+09:00"}]}