{"total_count":1,"results":[{"id":78980,"original_title":"Journal of vacuum science \u0026 technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society","title_alternative":"J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science \u0026 technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena","title_transcription":"","title_alternative_transcription":null,"pub_date":null,"statement_of_responsibility":"","creators":[],"contributors":[],"publishers":[{"full_name":"American Institute of Physics"}],"publication_place":"","extent":"","dimensions":null,"identifiers":[{"identifier_type":"issn","body":"0734211X"}],"subjects":[],"classfifications":[],"access_address":"","items":[],"created_at":"2011-07-26T03:57:06.148+09:00","updated_at":"2026-05-13T10:45:35.586+09:00"}]}