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<titleInfo>
  <title>Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Ion implantation technology 7</title>
</titleInfo>
<name type="personal">
  <namePart>International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan)</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Takagi, T.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
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  <publisher>North-Holland</publisher>
  <dateIssued/>
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  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <form authority="marcform">volume</form>
  <extent>xx, 994 p. ; 27 cm</extent>
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<subject>
</subject>
<classification authority="udc">539.1</classification>
<abstract/>
<note>Includes bibliographical references and index</note>
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  <recordCreationDate>2001-07-13 03:57:56 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:31:56 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/5328</recordIdentifier>
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