<?xml version="1.0" encoding="UTF-8"?>
<modsCollection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3">
<titleInfo>
  <title>Beam Injection Assessment of Microstructures in Semiconductors: Biams 2000</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Hajime,Tomokage</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Takashi,Sekiguchi.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <dateIssued>2000-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>ⅷ,441 p. ; 24 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">621.38</classification>
<abstract/>
<note/>
<identifier type="isbn">9783908450610</identifier>
<recordInfo>
  <recordCreationDate>2021-03-09 15:06:29 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:44:14 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/124417</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Beam Injection Assessment of Microstructures in Semiconductors BIAMS 2000: Proceedings of the 6th International Workshop on Beam Injection Assessment of Microstructures in Semiconductors held in Fukuoka, Japan, November 12-16, 2000  Vols. 78-79</title>
</titleInfo>
<titleInfo type="alternative">
  <title/>
</titleInfo>
<name type="personal">
  <namePart>Editors: Hajime Tomokage, Takashi Sekiguchi</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Scitec Publications Ltd</publisher>
  <dateIssued>2001-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>441p; 25cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">548.526</classification>
<abstract/>
<note/>
<identifier type="isbn">9783908450610</identifier>
<recordInfo>
  <recordCreationDate>2001-06-06 23:11:26 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:52:45 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/39567</recordIdentifier>
</recordInfo>
</modsCollection>
