<?xml version="1.0" encoding="UTF-8"?>
<modsCollection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3">
<titleInfo>
  <title>Low temperature plasma physics : fundamental aspects and applications</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Hippler, R.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Pfau, Sigismund</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Wiley-VCH</publisher>
  <dateIssued>2001-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>523 p.</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">533.9</classification>
<abstract/>
<note/>
<identifier type="isbn">9783527288878</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:51 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:28:06 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132424</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Polymeric nanostructures and their applications</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Nalwa, Hari Singh</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Scientific Publishers</publisher>
  <dateIssued>2007-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>29 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">678</classification>
<abstract/>
<note>Vol. 1. Polymer nanostructures -- v. 2. Applications
Includes bibliographical references and indexes</note>
<identifier type="isbn">9781588830692</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:51 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 14:54:21 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132425</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Niobium, science &amp; technology : proceedings of the International Symposium Niobium 2001 held in Orlando, Florida, USA., December 2-5, 2001</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Niobium, science and technology</title>
</titleInfo>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Niobium 2001 Limited ; TMS</publisher>
  <dateIssued>2002-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xiii, 1162 p. ; 24 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">669.293</classification>
<abstract/>
<note/>
<identifier type="isbn">9780971206809</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:51 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 14:54:21 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132426</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Applications to nonthermal plasma processing</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Roth, J. Reece</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Institute of Physics Pub.</publisher>
  <dateIssued>2001-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xi, 645 p. ; 24 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">533.9</classification>
<abstract/>
<note/>
<identifier type="isbn">9780750305457</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:50 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:28:09 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132422</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Structure and properties of atomic nanoclusters</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Alonso, J. A.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Imperial College Press</publisher>
  <dateIssued>2005-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xv, 410 p. ; 24 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">539</classification>
<abstract/>
<note/>
<identifier type="isbn">9781860945519</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:50 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:31:17 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132423</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Chemical physics of thin film deposition processes for micro- and nano-technologies</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001</title>
</titleInfo>
<name type="personal">
  <namePart>Pauleau, Y.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Kluwer Academic</publisher>
  <dateIssued>2002-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xiii, 363 p. ; 25 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">539.216</classification>
<abstract/>
<note/>
<identifier type="isbn">9781402005251</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:49 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:33:01 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132419</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Nanoindentation</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Fischer-Cripps, Anthony C.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Springer</publisher>
  <dateIssued>2004-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xxii, 263 p. ; 25 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">531.7</classification>
<abstract/>
<note/>
<identifier type="isbn">9780387220451</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:49 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:27:50 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132420</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Industrial plasma engineering</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Roth, J. Reece</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Institute of Physics Pub.</publisher>
  <dateIssued>1995-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xvi, 538 p. ; 25 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">533.9</classification>
<abstract/>
<note>"Reprinted 2000(pbk), 2003(hbk)" -- T.p. verso</note>
<identifier type="isbn">9780750303170</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:49 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:28:08 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132421</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Industrial plasma technology : applications from environmental to energy technologies</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>河合, 良信</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>池上, 英雄</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>佐藤, 徳芳</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Matsuda, Akihisa</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>内野, 喜一郎</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>葛谷, 昌之</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Mizuno, Akira</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Wiley-VCH</publisher>
  <dateIssued>2010-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xxxi, 434 p. ; 25 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">533.9</classification>
<abstract/>
<note/>
<identifier type="isbn">9783527325443</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:48 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:28:07 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132418</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Semiconductor material and device characterization</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>Schroder, Dieter K.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>IEEE Press, Wiley-Interscience</publisher>
  <dateIssued>2006-01-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xv, 779 p. ; 25 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">621.315.592</classification>
<abstract/>
<note/>
<identifier type="isbn">9780471739067</identifier>
<recordInfo>
  <recordCreationDate>2024-01-16 11:19:47 +0900</recordCreationDate>
  <recordChangeDate>2026-03-25 09:34:17 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/132416</recordIdentifier>
</recordInfo>
</modsCollection>
