Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A. - Materials Research Society. Spring Meeting; Pawlak, B. J. (Materials Research Society)
"This volume contains papers presented at Symposium E, 'Doping engineering for front-end processing' held March 25-27 at the 2008 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes