Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. - Vengallatore, Srikar; Bagdahn, Jörg; Sheppard, Norman F., Jr.; Spearing, S. Mark; Materials Research Society. Meeting (Materials Research Society)
Other editors: Jörg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing//Includes bibliographical references and indexes