Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. - Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics; Materials Research Society; McKerrow, Andrew J.; Leu, Jihperng (Jim); Kraft, Oliver; Kikkawa, Takamaro (Materials Research Society)
Includes bibliographical references and indexes