Ultrapurification of semiconductor materials : proceedings of the conference on ultrapurification of semiconductor materials, Boston, Massachusetts, April 11-13, 1961 </titleInfo> <name type="personal"> <namePart>Brooks, M. S. (Marvin S.)</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Kennedy, J. K. (John K.)</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Air Force Cambridge Research Laboratories (U.S.). Electronics Research Directorate</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Conference on Ultrapurification of Semiconductor Materials (1961 : Boston, Mass.)</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>edited by M.S. Brooks, J.K. Kennedy; Sponsored by the Electronics Research Directorate, Air Force Cambridge Research Laboratories</namePart> </name> <typeOfResource>text</typeOfResource> <originInfo> <publisher>Macmillan</publisher> <dateIssued/> <frequency>unknown</frequency> </originInfo> <language> <languageTerm authority="iso639-2b" type="code">eng</languageTerm> </language> <physicalDescription> <form authority="marcform">volume</form> <extent>655 p. ; 25 cm</extent> </physicalDescription> <subject> </subject> <classification authority="udc">537.311.3</classification> <abstract/> <note>Sponsored by the Electronics Research Directorate,Air Force Cambridge Research Laboratories//Includes bibliographies</note> <recordInfo> <recordCreationDate>1999-05-19 07:24:38 +0900</recordCreationDate> <recordChangeDate>2025-12-15 09:29:59 +0900</recordChangeDate> <recordIdentifier>https://library.nims.go.jp/manifestations/38222</recordIdentifier> </recordInfo> </modsCollection>