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  <title>Towards synthesis of micro-/nano-systems : the 11th International Conference on Precision Engineering (ICPE), August 16-18, 2006, Tokyo, Japan</title>
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  <title/>
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<name type="personal">
  <namePart>International Conference on Precision Engineering</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
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  <namePart>木村, 文彦</namePart>
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    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
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<name type="personal">
  <namePart>Horio, Kenichiro</namePart>
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    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
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<name type="personal">
  <namePart>精密工学会</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
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<name type="personal">
  <namePart>American Society for Precision Engineering</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>European Society for Precision Engineering and Nanotechnology</namePart>
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    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
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  <publisher>Springer</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
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  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xiii, 356 p. ; 31 cm</extent>
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<subject>
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<classification authority="udc">681</classification>
<abstract/>
<note>"Organized by JSPE (Japan Society for Precision Engineering), co-organized by ASPE (American Society for Precision Engineering), euspen (European Society for Precision Engineering and Nanotechnology)."//Includes bibliographical references//Accompanied by 1 CD-ROM</note>
<identifier type="isbn">9781846285585</identifier>
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  <recordChangeDate>2025-12-15 09:49:06 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/35677</recordIdentifier>
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