Biomicroelectromechanical systems (BioMEMS) : symposium held April 22-25, 2003, San Francisco, California, U.S.A. </titleInfo> <name type="personal"> <namePart>Ozkan, Cengiz S.</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Santini, Jr., John T.</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Gao, Huajian</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Bao, Gang</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Materials Research Society</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <typeOfResource>text</typeOfResource> <originInfo> <publisher>Materials Research Society</publisher> <dateIssued/> <frequency>unknown</frequency> </originInfo> <language> <languageTerm authority="iso639-2b" type="code">eng</languageTerm> </language> <physicalDescription> <form authority="marcform">volume</form> <extent>ix, 187 p. ; 24 cm</extent> </physicalDescription> <subject> </subject> <classification authority="udc">MRS</classification> <abstract/> <note>Includes bibliographies and indexes</note> <identifier type="isbn">9781558997103</identifier> <recordInfo> <recordCreationDate>2004-02-09 20:23:52 +0900</recordCreationDate> <recordChangeDate>2025-12-03 16:34:54 +0900</recordChangeDate> <recordIdentifier>https://library.nims.go.jp/manifestations/42503</recordIdentifier> </recordInfo> <titleInfo> <title>Thin films : stresses and mechanical properties IX : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A. Thin films : stresses and mechanical properties 9 Ozkan, Cengiz S. creator Freund, L. Ben creator Cammarata, Robert C. creator Gao, Huajian creator text Materials Research Society unknown eng
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xv, 511 p. ; 24 cm MRS Includes bibliographical references and indexes 9781558996311 2002-08-21 23:44:21 +0900 2025-12-03 16:34:46 +0900 https://library.nims.go.jp/manifestations/42821