MEMS : introduction and fundamentals
Gad-el-Hak, Mohamed
creator
text
CRC, Taylor & Francis
2006-01-01 00:00:00 +0900
unknown
eng
1 v. (various pagings) ; 26 cm
681
The MEMS handbook, 2nd ed
"A CRC Press book"--Back cover
Includes bibliographical references and index
9780849391378
2024-01-16 11:19:54 +0900
2026-03-17 15:49:44 +0900
https://library.nims.go.jp/manifestations/132433