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  <title>薄膜作製応用ハンドブック</title>
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  <namePart>小川, 正毅</namePart>
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  <namePart>多賀, 康訓</namePart>
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  <namePart>八瀬, 清志</namePart>
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  <namePart>権田, 俊一</namePart>
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  <publisher>エヌ・ティー・エス</publisher>
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  <form authority="marcform">volume</form>
  <extent>5, 15, 1330, 25, 19, 18p, 図版18p, 表9p ; 27cm</extent>
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<classification authority="udc">539.23</classification>
<abstract/>
<note>監修: 權田俊一//執筆者: 權田俊一ほか//参考・引用文献: 各章末</note>
<identifier type="isbn">9784860430191</identifier>
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  <recordChangeDate>2025-12-15 09:23:33 +0900</recordChangeDate>
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