Electron spectroscopy for surface analysis Ibach, H. creator Carette, J. D. creator edited by Harald Ibach : with contributions by J.D. Carette, B. Feuerbacher, B. Fitton text Springer-Verlag unknown eng
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ix, 190 p. ; 28 cm 620.187.5 Includes bibliographical references and index 9784431702344 1901-01-01 09:00:00 +0900 2025-12-15 09:41:42 +0900 https://library.nims.go.jp/manifestations/43002 Metal impurities in silicon-device fabrication </titleInfo> <name type="personal"> <namePart>Graff, Klaus</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <typeOfResource>text</typeOfResource> <originInfo> <publisher>Springer-Verlag</publisher> <dateIssued/> <frequency>unknown</frequency> </originInfo> <language> <languageTerm authority="iso639-2b" type="code">eng</languageTerm> </language> <physicalDescription> <form authority="marcform">volume</form> <extent>ix, 216 p. ; 25 cm</extent> </physicalDescription> <subject> </subject> <classification authority="udc">669.05</classification> <abstract/> <note>Includes bibliographical references and index</note> <identifier type="isbn">9783540583172</identifier> <recordInfo> <recordCreationDate>1901-01-01 09:00:00 +0900</recordCreationDate> <recordChangeDate>2025-04-21 15:21:24 +0900</recordChangeDate> <recordIdentifier>https://library.nims.go.jp/manifestations/42926</recordIdentifier> </recordInfo> </modsCollection>