<?xml version="1.0" encoding="UTF-8"?>
<modsCollection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3">
<titleInfo>
  <title>Proceedings of the International Conference on Advanced Microelectronic Devices and Processing, March 3-5, 1994, Sendai International Center, Sendai, Japan</title>
</titleInfo>
<titleInfo type="alternative">
  <title>International Conference on AMDP : Advanced Microelectronic Devices and Processing, March 3-5, 1994, Sendai, Japan//AMDP, March 3-5, 1994, Sendai</title>
</titleInfo>
<name type="personal">
  <namePart>International Conference on Advanced Microelectronic Devices and Processing</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>[Research Institute of Electrical Communication, Tohoku University]</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>xv, 788 p. ; 30 cm</extent>
</physicalDescription>
<subject>
</subject>
<classification authority="udc">537.311</classification>
<abstract/>
<note/>
<identifier type="isbn">9784990028015</identifier>
<recordInfo>
  <recordCreationDate>2002-11-06 19:25:19 +0900</recordCreationDate>
  <recordChangeDate>2025-12-15 09:29:56 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/71964</recordIdentifier>
</recordInfo>
</modsCollection>
