<?xml version="1.0" encoding="UTF-8"?>
<modsCollection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3">
<titleInfo>
  <title>Journal of vacuum science &amp; technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society</title>
</titleInfo>
<titleInfo type="alternative">
  <title>J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science &amp; technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena</title>
</titleInfo>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science &amp; technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:57:06 +0900</recordCreationDate>
  <recordChangeDate>2026-05-13 10:45:35 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78980</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Physics Today</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Phys. today</title>
</titleInfo>
<name type="personal">
  <namePart>American Institute of Physics</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫37
</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:45:41 +0900</recordCreationDate>
  <recordChangeDate>2026-05-19 15:24:18 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78732</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Journal of vacuum science and technology</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>American Vacuum Society</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫27
継続後誌：Journal of vacuum science &amp; technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
継続後誌：Journal of vacuum science &amp; technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:43:58 +0900</recordCreationDate>
  <recordChangeDate>2026-05-13 10:36:34 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78686</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Soviet physics. Semiconductors</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Soviet physics. Semiconductors//Sov. phys. Semiconduct//Semiconductors//Физика и техника полупроводников//Fizika i tekhnika poluprovodnikov</title>
</titleInfo>
<name type="personal">
  <namePart>American Institute of Physics</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Consultants Bureau</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>Rossiĭskai︠a︡ akademii︠a︡ nauk</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫42-43
</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:42:23 +0900</recordCreationDate>
  <recordChangeDate>2026-05-21 16:19:33 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78650</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Applied Physics Letters</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Appl. phys. lett</title>
</titleInfo>
<name type="personal">
  <namePart>American Institute of Physics</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫3-4; 桜 集密書庫</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:37:53 +0900</recordCreationDate>
  <recordChangeDate>2026-06-11 10:52:44 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78495</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>Soviet physics. JETP</title>
</titleInfo>
<titleInfo type="alternative">
  <title>Журнал экспериментальной и теоретической физики//Zhurnal ėksperimentalʹnoĭ i teoreticheskoĭ fiziki//Journal of experimental and theoretical physics//Soviet physics - J.E.T.P//Sov. phys. JETP</title>
</titleInfo>
<name type="personal">
  <namePart>Akademii︠a︡ nauk SSSR</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>American Institute of Physics</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫42
継続後誌：Journal of experimental and theoretical physics</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:37:44 +0900</recordCreationDate>
  <recordChangeDate>2026-05-21 16:17:44 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78482</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>The Journal of Chemical Physics</title>
</titleInfo>
<titleInfo type="alternative">
  <title>J. chem. phys</title>
</titleInfo>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent></extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>【配架場所】並木 集密書庫17-18
</note>
<recordInfo>
  <recordCreationDate>2011-07-26 03:36:30 +0900</recordCreationDate>
  <recordChangeDate>2026-04-13 16:43:44 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/78395</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>JANAF thermochemical tables</title>
</titleInfo>
<titleInfo type="alternative">
  <title>NIST-JANAF thermochemical tables</title>
</titleInfo>
<name type="personal">
  <namePart>Chase, M. W.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<name type="personal">
  <namePart>United States. National Bureau of Standards</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>Published by the American Chemical Society, and the American Institute of Physics for the National Bureau of Standards</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>1 v. ; 30 cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>Includes index//New edition's title: NIST-JANAF thermochemical tables (c1998)</note>
<identifier type="isbn">9780883184738</identifier>
<recordInfo>
  <recordCreationDate>1999-05-19 08:20:33 +0900</recordCreationDate>
  <recordChangeDate>2025-12-23 15:15:59 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/30055</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>JANAF thermochemical tables</title>
</titleInfo>
<titleInfo type="alternative">
  <title/>
</titleInfo>
<name type="personal">
  <namePart>Chase, M. W.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Chemical Society</publisher>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>1 v. ; 29 cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>1999-05-19 07:34:57 +0900</recordCreationDate>
  <recordChangeDate>2025-12-23 15:15:49 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/31905</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>JANAF thermochemical tables</title>
</titleInfo>
<titleInfo type="alternative">
  <title/>
</titleInfo>
<name type="personal">
  <namePart>Chase, M. W.</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>American Chemical Society</publisher>
  <publisher>American Institute of Physics</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>1 v. ; 29 cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>1999-05-19 07:34:56 +0900</recordCreationDate>
  <recordChangeDate>2025-12-23 15:17:40 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/31904</recordIdentifier>
</recordInfo>
</modsCollection>
