Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
J. vac. sci. technol., A, Vac. surf. films//Journal of vacuum science & technology. A. Vacuum, surfaces, and films//Journal of vacuum science and technology. A, Vacuum, surfaces, and films//JVST A. Vacuum, surfaces, and films//Journal of vacuum science & technology. Second series. A, An international journal devoted to vacuum, surfaces, and films//Journal of vacuum science & technology. 2nd series. A, An international journal devoted to vacuum, surfaces, and films
American Vacuum Society
creator
American Institute of Physics
creator
text
American Institute of Physics
unknown
eng
【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
2019-03-21 02:32:51 +0900
2026-05-13 10:43:22 +0900
https://library.nims.go.jp/manifestations/123397
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena
text
American Institute of Physics
unknown
eng
【配架場所】並木 集密書庫27
継続前誌：Journal of vacuum science and technology
継続後誌：Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
2011-07-26 03:57:06 +0900
2026-05-13 10:45:35 +0900
https://library.nims.go.jp/manifestations/78980
Journal of vacuum science and technology
American Vacuum Society
creator
text
American Institute of Physics
unknown
eng
【配架場所】並木 集密書庫27
継続後誌：Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
継続後誌：Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
2011-07-26 03:43:58 +0900
2026-05-13 10:36:34 +0900
https://library.nims.go.jp/manifestations/78686