Amorphous and Heterogeneous Silicon-Baced Films - 2002 : Symposium held April 2-5, 2002, San Francisco, California, U.S.A.; MRS Vol.715 Vol.715 - editors； J. David Cohen, John R. Abelson, Hideki Matsumura, John Robertson [et al.] (Materials Research Society (MRS), 2002)