<?xml version="1.0" encoding="UTF-8"?>
<modsCollection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3">
<titleInfo>
  <title>逆向型ラジカル源を用いた薄膜化技術に関する研究 : 平成3〜6年度無機材質特別研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title>平成3~6年度無機材質特別研究</title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>17p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 15:12:31 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:29 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101036</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>超高圧力技術に関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>1冊 ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>1989より出版地の地名変更: 桜村 (茨城県)→つくば//1994より大きさ変更:26cm→30cm</note>
<recordInfo>
  <recordCreationDate>2014-01-30 15:07:57 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:29 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101035</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>窒化けい素に関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>68p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 11:35:19 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:43:43 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101032</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>モンモリロナイトに関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>110p ; 26cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 11:29:04 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:43:39 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101029</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>超高圧力技術に関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>1冊 ; 26cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note>1989より出版地の地名変更: 桜村 (茨城県)→つくば//1994より大きさ変更:26cm→30cm</note>
<recordInfo>
  <recordCreationDate>2014-01-30 11:23:52 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:43:39 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101028</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>テルル酸塩ガラスに関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>88p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 11:00:39 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:29 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101027</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>スメクタイトに関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>61p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 10:57:22 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:29 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101026</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>炭化タングステンに関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>76p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 10:54:25 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:29 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101025</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>チタノガリウム酸塩に関する研究</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<name type="personal">
  <namePart>科学技術庁無機材質研究所</namePart>
  <role>
    <roleTerm type="text" authority="marcrelator">creator</roleTerm>
  </role>
</name>
<typeOfResource>text</typeOfResource>
<originInfo>
  <publisher>科学技術庁無機材質研究所</publisher>
  <dateIssued/>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>112p ; 30cm</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 10:51:05 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:42:30 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101024</recordIdentifier>
</recordInfo>
<titleInfo>
  <title>超高温技術に関する研究（第2報）</title>
</titleInfo>
<titleInfo type="alternative">
  <title></title>
</titleInfo>
<typeOfResource>text</typeOfResource>
<originInfo>
  <dateIssued>1993-11-01 00:00:00 +0900</dateIssued>
  <frequency>unknown</frequency>
</originInfo>
<language>
  <languageTerm authority="iso639-2b" type="code">jpn</languageTerm>
</language>
<physicalDescription>
  <form authority="marcform">volume</form>
  <extent>30cm; 52p</extent>
</physicalDescription>
<subject>
</subject>
<abstract/>
<note/>
<recordInfo>
  <recordCreationDate>2014-01-30 10:47:47 +0900</recordCreationDate>
  <recordChangeDate>2025-04-21 10:43:38 +0900</recordChangeDate>
  <recordIdentifier>https://library.nims.go.jp/manifestations/101023</recordIdentifier>
</recordInfo>
</modsCollection>
