Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A. - Materials Research Society. Spring Meeting; Pawlak, B. J. (Materials Research Society)
"This volume contains papers presented at Symposium C, "Sub-Second Rapid Thermal Processing for Device Fabrication," held April 18-19 at the 2006 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes