Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A. Materials science of microelectromechanical systems (MEMS) devices 4//Materials science of microelectromechanical systems (MEMS) devices four Materials Research Society creator Ayón, Arturo A. creator Buchheit, Thomas E. creator Kahn, Harold creator Spearing, S. Mark creator text Materials Research Society unknown eng
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xi, 318 p. ; 24 cm MRS Includes bibliographical references and indexes 9781558996236 2002-08-01 01:22:37 +0900 2025-12-03 16:34:45 +0900 https://library.nims.go.jp/manifestations/40847 Neutron scattering with a triple-axis spectrometer : basic techniques </titleInfo> <name type="personal"> <namePart>Shirane, G. (Gen)</namePart> <role> <roleTerm type="text" authority="marcrelator">creator</roleTerm> </role> </name> <name type="personal"> <namePart>Shapiro, S. M. 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