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  <title>半導体デバイス : 基礎理論とプロセス技術</title>
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  <title>Semiconductor devices : physics and technology</title>
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  <namePart>Sze, S. M.</namePart>
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  <namePart>南日, 康夫</namePart>
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  <namePart>川辺, 光央</namePart>
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  <namePart>長谷川, 文夫</namePart>
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  <publisher>産業図書</publisher>
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  <form authority="marcform">volume</form>
  <extent>vi, 557 p ; 22cm</extent>
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<classification authority="udc">621.38</classification>
<abstract/>
<note>参考文献: 章末</note>
<identifier type="isbn">9784782855256</identifier>
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