manifestation_id	original_title	title_alternative	title_transcription	statement_of_responsibility	manifestation_identifier	creator	contributor	publisher	date_of_publication	pub_date	year_of_publication	publication_place	manifestation_created_at	manifestation_updated_at	carrier_type	content_type	frequency	language	isbn	issn	doi	jpno	ncid	lccn	iss_itemno	volume_number	volume_number_string	edition	edition_string	issue_number	issue_number_string	serial_number	extent	start_page	end_page	dimensions	height	width	depth	manifestation_price	access_address	manifestation_required_role	abstract	description	identifier:unknown	identifier:nbn	identifier:isbn10	identifier:iss_itemno	identifier:online_isbn	identifier:print_isbn	identifier:print_issn	identifier:online_issn	identifier:escidoc	identifier:nims	series_statement_id	series_statement_original_title	series_statement_title_subseries	series_statement_title_subseries_transcription	series_statement_title_transcription	series_statement_creator	series_statement_volume_number	series_statement_series_master	series_statement_root_manifestation_id	series_statement_manifestation_id	series_statement_position	series_statement_note	series_statement_created_at	series_statement_updated_at	subject:ndlsh	subject:unknown	subject:bsh	classification:ndc8	classification:ndc9	classification:udc	item_id	item_identifier	binding_item_identifier	call_number	library	shelf	item_note	accepted_at	acquired_at	item_created_at	item_updated_at
40847	Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.	Materials science of microelectromechanical systems (MEMS) devices 4//Materials science of microelectromechanical systems (MEMS) devices four	  	editors, Arturo A. Ayón ... [et al.]	68127	Materials Research Society//Ayón, Arturo A.//Buchheit, Thomas E.//Kahn, Harold//Spearing, S. Mark	""	Materials Research Society		2002			2002-08-01 01:22:37 +0900	2025-12-03 16:34:45 +0900	volume	text	unknown	English	9781558996236	""			BA57659263										xi, 318 p. ; 24 cm	1	318		24.0					Guest			""	""	""	""	""	""	""	""	""	""	71721	Materials Research Society symposium proceedings	""	""	""	""	v. 687	""	""	40847	18660	""	2024-11-28 22:05:13 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	42205	219241		MRS|P|687	namiki	N10600207			2002-07-31 00:00:00 +0900	2010-12-15 23:45:13 +0900	2025-12-03 16:34:45 +0900
43319	Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.	Materials science of microelectromechanical systems (MEMS) devices 3	  	editors, Harold Kahn ... [et al.]	67479	Kahn, Harold	""	Materials Research Society		2001	2001		2002-01-29 02:37:24 +0900	2025-12-03 16:34:43 +0900	volume	text	unknown	English	9781558995673	02729172			BA54946961										1 v. ; 24 cm	1			24.0					Guest			""	""	""	""	""	""	""	""	""	""	71712	Materials Research Society symposium proceedings	""	""	""	""	v. 657	""	""	43319	18651	""	2024-11-28 22:05:10 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	45123	219096		MRS|P|657	namiki	N10600206			2002-01-30 00:00:00 +0900	2010-12-16 00:00:33 +0900	2025-12-03 16:34:43 +0900