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39372	Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A.	Materials science of microelectromechanical systems (MEMS) devices 2	  	editors, Maarten P. de Boer ... [et al.]	65312	P. de Boer, Maarten	""	Materials Research Society		2000	2000		2001-03-26 22:51:36 +0900	2025-12-03 16:34:39 +0900	volume	text	unknown	English	9781558995130	02729172			BA49023729										xiii, 314 p. ; 24 cm	1	314		24.0					Guest			""	""	""	""	""	""	""	""	""	""	71657	Materials Research Society symposium proceedings	""	""	""	""	v. 605	""	""	39372	18596	""	2024-11-28 22:04:50 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	40486	218782		MRS|P|605	namiki	N10600205			2001-03-21 00:00:00 +0900	2010-12-15 23:37:10 +0900	2025-12-03 16:34:39 +0900