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3509	Microelectronics processing : inorganic materials characterization		  	Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemimcal Society	64122	Casper, Lawrence A.//American Chemical Society. Division of Industrial and Engineering Chemistry	""	American Chemical Society		1986	1986		2000-12-26 03:26:37 +0900	2025-12-15 09:30:06 +0900	volume	text	unknown	English	9780841209343	""			BA00560858										x, 443 p. ; 24 cm	1	443		23.0					Guest			""	""	""	""	""	""	""	""	""	""	62890	ACS symposium series	""	""	""	""	295	""	""	3509	10307	""	2024-11-28 20:32:29 +0900	2025-11-13 10:48:20 +0900	""	""	""	""	""	537.5	3762	525186		537.5||04632	namiki	N00090205			1987-03-03 00:00:00 +0900	2010-12-15 20:31:16 +0900	2025-12-15 09:30:06 +0900