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41889	Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A.		  	editors, Gregg S. Higashi ... [et al.]	33785	Higashi, Gregg S.	""	Materials Research Society		1997			1901-01-01 09:00:00 +0900	2025-12-03 16:34:26 +0900	volume	text	unknown	English	9781558993815	""			BA33623148										xiii, 545 p. ; 24 cm	1	545							Guest			""	""	""	""	""	""	""	""	""	""	71571	Materials Research Society symposium proceedings	""	""	""	""	v. 477	""	""	41889	18510	""	2024-11-28 22:04:19 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	43493	217571		MRS|P|477	namiki	N10600107			1998-01-23 00:00:00 +0900	2010-12-15 23:51:17 +0900	2025-12-03 16:34:26 +0900