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75178	Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A.		  	editors, Gerfield Zwicker ... [et al.]	920927	Zwicker, Gerfield//Materials Research Society. Spring Meeting//Advances and Challenges in Chemical Mechanical Planarization	""	Materials Research Society		2007			2007-12-12 01:57:48 +0900	2025-12-03 16:35:08 +0900	volume	text	unknown	English	9781558999510	""			BA83960649										xi, 371 p. ; 24 cm	1	371		24.0					Guest			""	""	""	""	""	""	""	""	""	""	71930	Materials Research Society symposium proceedings	""	""	""	""	v. 991	""	""	75178	18869	""	2024-11-28 22:06:29 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	74900	211018		MRS|P|991	namiki	N10600306			2007-12-05 00:00:00 +0900	2010-12-16 02:34:45 +0900	2025-12-03 16:35:08 +0900