manifestation_id	original_title	title_alternative	title_transcription	statement_of_responsibility	manifestation_identifier	creator	contributor	publisher	date_of_publication	pub_date	year_of_publication	publication_place	manifestation_created_at	manifestation_updated_at	carrier_type	content_type	frequency	language	isbn	issn	doi	jpno	ncid	lccn	iss_itemno	volume_number	volume_number_string	edition	edition_string	issue_number	issue_number_string	serial_number	extent	start_page	end_page	dimensions	height	width	depth	manifestation_price	access_address	manifestation_required_role	abstract	description	identifier:unknown	identifier:nbn	identifier:isbn10	identifier:iss_itemno	identifier:online_isbn	identifier:print_isbn	identifier:print_issn	identifier:online_issn	identifier:escidoc	identifier:nims	series_statement_id	series_statement_original_title	series_statement_title_subseries	series_statement_title_subseries_transcription	series_statement_title_transcription	series_statement_creator	series_statement_volume_number	series_statement_series_master	series_statement_root_manifestation_id	series_statement_manifestation_id	series_statement_position	series_statement_note	series_statement_created_at	series_statement_updated_at	subject:ndlsh	subject:unknown	subject:bsh	classification:ndc8	classification:ndc9	classification:udc	item_id	item_identifier	binding_item_identifier	call_number	library	shelf	item_note	accepted_at	acquired_at	item_created_at	item_updated_at
100723	異種機能デバイス集積化技術の基礎と応用 : MEMS,NEMS,センサ,CMOSLSIの融合	Integration technology for heterogeneous advanced devices : basics and applications//High technology information	イシュ キノウ デバイス シュウセキカ ギジュツ ノ キソ ト オウヨウ : MEMS,NEMS,センサ,CMOSLSI ノ ユウゴウ	益一哉, 年吉洋, 町田克之監修		益, 一哉//年吉, 洋//町田, 克之	""	シーエムシー出版		2012-11	2012		2013-02-14 15:54:27 +0900	2025-12-15 09:43:33 +0900	volume	text	unknown	Japanese	9784781305868	""			BB1082106X										ix, 279p ; 27cm	1	279		27.0			68000		Guest			""	""	""	""	""	""	""	""	""	""	69312	新材料・新素材シリーズ	""	シンザイリョウ シンソザイ シリーズ	""	""	""	""	""	100723	16268	""	2024-11-28 21:35:08 +0900	2025-11-28 13:04:07 +0900	""	""	""	""	""	621.3	80121	600058		621.3|M	namiki	N00210505	""		2013-02-14 00:00:00 +0900	2013-02-15 09:58:09 +0900	2025-12-15 09:43:33 +0900