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42809	Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000		  	editors, Marc Heyns, Paul Mertens and Marc Meuris	64977	International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS)//Heyns, Marc//Mertens, Paul//Meuris, Marc	""	Scitec Publications		2001	2000		2000-12-26 19:03:04 +0900	2025-12-15 09:52:45 +0900	volume	text	unknown	English	9783908450573	10120394			BA7192768X										xiii, 321 p. ; 25 cm	1	321		25.0					Guest			""	""	""	""	""	""	""	""	""	""	68561	Diffusion and defect data : solid state data	""	""	""	""	pt. B . Solid state phenomena ; v. 76-77	""	""	42809	15519	""	2024-11-28 21:25:50 +0900	2025-11-28 13:04:07 +0900	""	""	""	""	""	548.526	45032	218743		548.526|D|11420	namiki	N10080201			2001-02-13 00:00:00 +0900	2010-12-16 00:00:00 +0900	2025-12-15 09:52:45 +0900