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132419	Chemical physics of thin film deposition processes for micro- and nano-technologies	Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001	""	edited by Yves Pauleau		Pauleau, Y.	""	Kluwer Academic	2002-01-01 00:00:00 +0900	2002	2002	Dordrecht	2024-01-16 11:19:49 +0900	2025-12-15 09:33:01 +0900	volume		unknown	English	9781402005251	""			BA57112551										xiii, 363 p. ; 25 cm									Guest			""	""	""	""	""	""	""	""	""	""	31678	NATO science series, Sub-series II, Mathematics, physics and chemistry	""	""	""	""	v. 55	""	""	132419	9118	""	2024-01-16 12:00:47 +0900	2025-10-15 15:07:18 +0900	""	""	""	""	""	539.216	102903	602722		539.216|P|	namiki	N00110502			2016-01-21 00:00:00 +0900	2024-01-16 11:19:49 +0900	2025-12-15 09:33:01 +0900