manifestation_id original_title title_alternative title_transcription statement_of_responsibility manifestation_identifier creator contributor publisher date_of_publication pub_date year_of_publication publication_place manifestation_created_at manifestation_updated_at carrier_type content_type frequency language isbn issn doi jpno ncid lccn iss_itemno volume_number volume_number_string edition edition_string issue_number issue_number_string serial_number extent start_page end_page dimensions height width depth manifestation_price access_address manifestation_required_role abstract description identifier:unknown identifier:nbn identifier:isbn10 identifier:iss_itemno identifier:online_isbn identifier:print_isbn identifier:print_issn identifier:online_issn identifier:escidoc identifier:nims series_statement_id series_statement_original_title series_statement_title_subseries series_statement_title_subseries_transcription series_statement_title_transcription series_statement_creator series_statement_volume_number series_statement_series_master series_statement_root_manifestation_id series_statement_manifestation_id series_statement_position series_statement_note series_statement_created_at series_statement_updated_at subject:ndlsh subject:unknown subject:bsh classification:ndc8 classification:ndc9 classification:udc item_id item_identifier binding_item_identifier call_number library shelf item_note accepted_at acquired_at item_created_at item_updated_at 123397 Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society J. vac. sci. technol., A, Vac. surf. films//Journal of vacuum science & technology. A. Vacuum, surfaces, and films//Journal of vacuum science and technology. A, Vacuum, surfaces, and films//JVST A. Vacuum, surfaces, and films//Journal of vacuum science & technology. Second series. A, An international journal devoted to vacuum, surfaces, and films//Journal of vacuum science & technology. 2nd series. A, An international journal devoted to vacuum, surfaces, and films "" "" American Vacuum Society//American Institute of Physics "" American Institute of Physics "" 2019-03-21 02:32:51 +0900 2026-05-13 10:43:22 +0900 volume text unknown English "" 15531813//07342101 AA10635514 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" 99112 Soviet physics. Solid state Sov. phys., Solid state//физика твердого тела//Fizika tverdogo tela//Sov. Phys. Solid State "" "" American Institute of Physics "" American Institute of Physics "" 2012-04-25 21:45:37 +0900 2026-05-21 16:21:47 +0900 volume text unknown English "" 00385654 AA00846309 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 1306 Soviet Physics : Solid State "" "" "" "" "" true 99112 99112 88 "" 2011-03-30 23:58:20 +0900 2026-05-21 16:21:44 +0900 "" "" "" "" "" "" 99105 Journal of Physical and Chemical Reference Data J. phys. chem. ref. data "" "" American Chemical Society "" "" "" 2012-04-25 14:27:47 +0900 2026-05-01 15:25:37 +0900 volume text unknown English "" 00472689 AA00704778 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 1549 Journal of Physical and Chemical Reference Data "" "" "" "" "" true 99105 99105 110 "" 2011-03-31 00:01:32 +0900 2026-05-01 15:25:36 +0900 "" "" "" "" "" "" 99087 Journal of Applied Physics J. appl. phys "" "" American Institute of Physics//American Physical Society "" American Institute of Physics "" 2012-03-25 00:02:27 +0900 2026-04-13 16:04:27 +0900 volume text unknown English "" 00218979 AA00693547 "" "" "" "" https://pubs.aip.org/aip/jap Guest "" "" "" "" "" "" "" "" "" "" 1309 Journal of Applied Physics "" "" "" "" "" true 99087 99087 91 "" 2011-03-30 23:58:28 +0900 2026-04-13 16:04:02 +0900 "" "" "" "" "" "" 91133 The physical review. Second series Physical review. Ser. 2//Phys. rev//Physical review "" "" American Physical Society "" American Institute of Physics "" 2011-07-26 05:33:14 +0900 2026-05-18 16:16:01 +0900 volume text unknown English "" "" AA00773566 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 14731 The Physical Review 2nd Series "" "" "" "" "" true 91133 91133 898 "" 2011-07-26 05:33:14 +0900 2026-05-18 16:16:00 +0900 "" "" "" "" "" "" 79372 Physical review. Third series. C, Nuclear physics Phys. rev. C. Nucl. phys//Physical review. C. Nuclear physics//Physical review. Ser. 3. C, Nuclear physics "" the American Physical Society American Physical Society "" American Institute of Physics "" 2011-07-26 04:28:27 +0900 2026-05-19 11:00:07 +0900 volume text unknown English "" 24699985 AA00773613 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 2970 Physical Review C : Nuclear Physics "" "" "" "" "" true 79372 79372 646 "" 2011-07-26 04:28:27 +0900 2026-05-19 11:00:07 +0900 "" "" "" "" "" "" 79100 Journal of Materials Research J. mater. res//Materials research "" "" Materials Research Society//American Institute of Physics "" Published for the Materials Research Society by the American Institute of Physics "" 2011-07-26 04:03:52 +0900 2026-04-17 16:37:22 +0900 volume text unknown English "" 08842914//20445326 AA10664454 "" "" "" "" https://journals.cambridge.org/jid_JMR Guest "" "" "" "" "" "" "" "" "" "" 26061 Journal of Materials Research "" "" "" "" "" true 79100 79100 4249 "" 2016-02-23 09:52:32 +0900 2026-05-01 17:00:31 +0900 "" "" "" "" "" "" 78980 Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena "" "" "" "" American Institute of Physics "" 2011-07-26 03:57:06 +0900 2026-05-13 10:45:35 +0900 volume text unknown English "" 0734211X AA10635106 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 26088 Journal of Vacuum Science & Technology B "" "" "" "" "" true 78980 78980 4272 "" 2016-02-23 09:59:06 +0900 2026-05-13 10:45:22 +0900 "" "" "" "" "" "" 78732 Physics Today Phys. today "" "" American Institute of Physics "" American Institute of Physics "" 2011-07-26 03:45:41 +0900 2026-05-19 15:24:18 +0900 volume text unknown English "" 00319228 AA00352896 "" "" "" "" https://www.physicstoday.org/ Guest "" "" "" "" "" "" "" "" "" "" 25952 Physics Today "" "" "" "" "" true 78732 78732 4144 "" 2016-02-23 09:14:17 +0900 2026-05-19 15:24:15 +0900 "" "" "" "" "" "" 78686 Journal of vacuum science and technology "" "" "" American Vacuum Society "" American Institute of Physics "" 2011-07-26 03:43:58 +0900 2026-05-13 10:36:34 +0900 volume text unknown English "" 00225355 AA00708677 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 2284 Journal of Vacuum Science & Technology "" "" "" "" "" true 78686 78686 386 "" 2011-07-26 03:43:58 +0900 2026-05-13 10:36:18 +0900 "" "" "" "" "" ""