manifestation_id original_title title_alternative title_transcription statement_of_responsibility manifestation_identifier creator contributor publisher date_of_publication pub_date year_of_publication publication_place manifestation_created_at manifestation_updated_at carrier_type content_type frequency language isbn issn doi jpno ncid lccn iss_itemno volume_number volume_number_string edition edition_string issue_number issue_number_string serial_number extent start_page end_page dimensions height width depth manifestation_price access_address manifestation_required_role abstract description identifier:unknown identifier:nbn identifier:isbn10 identifier:iss_itemno identifier:online_isbn identifier:print_isbn identifier:print_issn identifier:online_issn identifier:escidoc identifier:nims series_statement_id series_statement_original_title series_statement_title_subseries series_statement_title_subseries_transcription series_statement_title_transcription series_statement_creator series_statement_volume_number series_statement_series_master series_statement_root_manifestation_id series_statement_manifestation_id series_statement_position series_statement_note series_statement_created_at series_statement_updated_at subject:ndlsh subject:unknown subject:bsh classification:ndc8 classification:ndc9 classification:udc item_id item_identifier binding_item_identifier call_number library shelf item_note accepted_at acquired_at item_created_at item_updated_at 78980 Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena "" "" "" "" American Institute of Physics "" 2011-07-26 03:57:06 +0900 2026-05-13 10:45:35 +0900 volume text unknown English "" 0734211X AA10635106 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 26088 Journal of Vacuum Science & Technology B "" "" "" "" "" true 78980 78980 4272 "" 2016-02-23 09:59:06 +0900 2026-05-13 10:45:22 +0900 "" "" "" "" "" "" 78732 Physics Today Phys. today "" "" American Institute of Physics "" American Institute of Physics "" 2011-07-26 03:45:41 +0900 2026-05-19 15:24:18 +0900 volume text unknown English "" 00319228 AA00352896 "" "" "" "" https://www.physicstoday.org/ Guest "" "" "" "" "" "" "" "" "" "" 25952 Physics Today "" "" "" "" "" true 78732 78732 4144 "" 2016-02-23 09:14:17 +0900 2026-05-19 15:24:15 +0900 "" "" "" "" "" "" 78686 Journal of vacuum science and technology "" "" "" American Vacuum Society "" American Institute of Physics "" 2011-07-26 03:43:58 +0900 2026-05-13 10:36:34 +0900 volume text unknown English "" 00225355 AA00708677 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 2284 Journal of Vacuum Science & Technology "" "" "" "" "" true 78686 78686 386 "" 2011-07-26 03:43:58 +0900 2026-05-13 10:36:18 +0900 "" "" "" "" "" "" 78650 Soviet physics. Semiconductors Soviet physics. Semiconductors//Sov. phys. Semiconduct//Semiconductors//Физика и техника полупроводников//Fizika i tekhnika poluprovodnikov "" "" American Institute of Physics//Consultants Bureau//Rossiĭskai︠a︡ akademii︠a︡ nauk "" American Institute of Physics "" 2011-07-26 03:42:23 +0900 2026-05-21 16:19:33 +0900 volume text unknown English "" 00385700 AA00846295 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 2248 Soviet Physics : Semiconductors "" "" "" "" "" true 78650 78650 375 "" 2011-07-26 03:42:23 +0900 2026-05-21 16:19:31 +0900 "" "" "" "" "" "" 78495 Applied Physics Letters Appl. phys. lett "" "" American Institute of Physics "" American Institute of Physics "" 2011-07-26 03:37:53 +0900 2026-06-11 10:52:44 +0900 volume text unknown English "" 00036951 AA00543431 "" "" "" "" https://pubs.aip.org/aip/apl Guest "" "" "" "" "" "" "" "" "" "" 25984 Applied Physics Letters "" "" "" "" "" true 78495 78495 4175 "" 2016-02-23 09:26:11 +0900 2026-05-01 17:00:31 +0900 "" "" "" "" "" "" 78482 Soviet physics. JETP Журнал экспериментальной и теоретической физики//Zhurnal ėksperimentalʹnoĭ i teoreticheskoĭ fiziki//Journal of experimental and theoretical physics//Soviet physics - J.E.T.P//Sov. phys. JETP "" Academy of Sciences of the USSR Akademii︠a︡ nauk SSSR//American Institute of Physics "" American Institute of Physics "" 2011-07-26 03:37:44 +0900 2026-05-21 16:17:44 +0900 volume text unknown English "" 00385646 AA00846262 "" "" "" "" "" Guest "" "" "" "" "" "" "" "" "" "" 2080 Soviet Physics : JETP "" "" "" "" "" true 78482 78482 281 "" 2011-07-26 03:37:44 +0900 2026-05-21 16:17:42 +0900 "" "" "" "" "" "" 78395 The Journal of Chemical Physics J. chem. phys "" "" "" "" American Institute of Physics "" 2011-07-26 03:36:30 +0900 2026-04-13 16:43:44 +0900 volume text unknown English "" 00219606 AA00694991 "" "" "" "" https://pubs.aip.org/aip/jcp Guest "" "" "" "" "" "" "" "" "" "" 1993 The Journal of Chemical Physics "" "" "" "" "" true 78395 78395 210 "" 2011-07-26 03:36:30 +0900 2026-04-13 16:43:28 +0900 "" "" "" "" "" "" 30055 JANAF thermochemical tables NIST-JANAF thermochemical tables M.W. Chase, Jr. ... [et al.] 28059 Chase, M. W.//United States. National Bureau of Standards "" Published by the American Chemical Society, and the American Institute of Physics for the National Bureau of Standards 1986 1999-05-19 08:20:33 +0900 2025-12-23 15:15:59 +0900 volume text unknown English 9780883184738 "" BA00634648 1 pt. 1. : Al-Co 3 3rd ed 1 v. ; 30 cm 1 1 0.0 0.0 0.0 2 Guest "" "" "" "" "" "" "" "" "" "" 71137 Journal of physical and chemical reference data "" "" "" "" v. 14, suppl. no. 1, 1985 false "" 30055 18070 "" 2024-11-28 21:59:33 +0900 2026-05-01 17:00:31 +0900 "" "" "" "" "" "" 35672 208136 544.31|J|8089 sengen S10060104 1987-05-21 00:00:00 +0900 2010-12-15 23:12:56 +0900 2025-12-23 15:15:59 +0900 31905 JANAF thermochemical tables M.W. Chase ... [et al.] 22863 Chase, M. W. "" American Chemical Society//American Institute of Physics 1978 1999-05-19 07:34:57 +0900 2025-12-23 15:15:49 +0900 volume text unknown English "" "" BA73508316 1978 1978 suppl 1 v. ; 29 cm 1 940 29.0 Guest "" "" "" "" "" "" "" "" "" "" 71141 Journal of physical and chemical reference data "" "" "" "" reprint no. 120 (vol. 7, no. 3, pages 793-940) false "" 31905 18074 "" 2024-11-28 21:59:35 +0900 2026-05-01 17:00:31 +0900 "" "" "" "" "" "" 32260 202282 544.31|Ｊ| sengen S10060104 1981-04-01 00:00:00 +0900 2010-12-15 22:55:54 +0900 2025-12-23 15:15:49 +0900 31904 JANAF thermochemical tables M.W. Chase ... [et al.] 22862 Chase, M. W. "" American Chemical Society//American Institute of Physics 1975 1999-05-19 07:34:56 +0900 2025-12-23 15:17:40 +0900 volume text unknown English "" "" BA73508316 1975 1975 suppl 1 v. ; 29 cm 1 175 29.0 Guest "" "" "" "" "" "" "" "" "" "" 71140 Journal of physical and chemical reference data "" "" "" "" reprint no. 60 (vol. 4, no. 1, pages 1-175) false "" 31904 18073 "" 2024-11-28 21:59:34 +0900 2026-05-01 17:00:31 +0900 "" "" "" "" "" "" 32259 202281 544.31|Ｊ|6443 sengen S10060104 1979-04-01 00:00:00 +0900 2010-12-15 22:55:54 +0900 2025-12-23 15:17:40 +0900