manifestation_id	original_title	title_alternative	title_transcription	statement_of_responsibility	manifestation_identifier	creator	contributor	publisher	date_of_publication	pub_date	year_of_publication	publication_place	manifestation_created_at	manifestation_updated_at	carrier_type	content_type	frequency	language	isbn	issn	doi	jpno	ncid	lccn	iss_itemno	volume_number	volume_number_string	edition	edition_string	issue_number	issue_number_string	serial_number	extent	start_page	end_page	dimensions	height	width	depth	manifestation_price	access_address	manifestation_required_role	abstract	description	identifier:unknown	identifier:nbn	identifier:isbn10	identifier:iss_itemno	identifier:online_isbn	identifier:print_isbn	identifier:print_issn	identifier:online_issn	identifier:escidoc	identifier:nims	series_statement_id	series_statement_original_title	series_statement_title_subseries	series_statement_title_subseries_transcription	series_statement_title_transcription	series_statement_creator	series_statement_volume_number	series_statement_series_master	series_statement_root_manifestation_id	series_statement_manifestation_id	series_statement_position	series_statement_note	series_statement_created_at	series_statement_updated_at	subject:ndlsh	subject:unknown	subject:bsh	classification:ndc8	classification:ndc9	classification:udc	item_id	item_identifier	binding_item_identifier	call_number	library	shelf	item_note	accepted_at	acquired_at	item_created_at	item_updated_at
66258	Microlithography		  		36658	Rai-Choudhury, P.	""	SPIE Optical Engineering Press//Institution of Electrical Engineers		1997			2000-11-14 23:22:29 +0900	2025-12-23 15:15:06 +0900	volume	text	unknown	English	9780819423788	""			BA31844102				: us						viii, 768 p. ; 26 cm	1	768		26.0			18648		Guest			""	""	""	""	""	""	""	""	""	""	71279	IEE materials & devices series	""	""	""	P. Rai-Choudhury, editor	12 . Handbook of microlithography, micromachining and microfabrication ; v. 1	""	""	66258	18218	""	2024-11-28 22:01:17 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	621.3	40232	218623		621.3|R|11306	sengen	S10080204			2000-12-11 00:00:00 +0900	2010-12-15 23:35:59 +0900	2025-12-23 15:15:06 +0900
40681	Properties of metal silicides	""	  	edited by Karen Maex and Marc van Rossum	34978	Maex, Karen//Rossum, Marc van//INSPEC (Information service)//Institution of Electrical Engineers	edited by Karen Maex and Marc Van Rossum	INSPEC		1995	1995		1999-11-12 20:00:43 +0900	2025-12-15 09:29:58 +0900	volume	text	unknown	English	9780852968598	""			BA25954059										xiv, 335 p. ; 29 cm	1	335		29.0					Guest			""	""	""	""	""	""	""	""	""	""	66889	EMIS datareviews series	""	""	""	""	no. 14	""	""	40681	13876	""	2024-11-28 21:09:26 +0900	2025-11-28 13:04:07 +0900	""	""	""	""	""	537.311	42029	216880		537.311|W|14	sengen	S00990909	""		1996-02-26 00:00:00 +0900	2010-12-15 23:44:24 +0900	2025-09-01 10:50:32 +0900
40681	Properties of metal silicides	""	  	edited by Karen Maex and Marc van Rossum	34978	Maex, Karen//Rossum, Marc van//INSPEC (Information service)//Institution of Electrical Engineers	edited by Karen Maex and Marc Van Rossum	INSPEC		1995	1995		1999-11-12 20:00:43 +0900	2025-12-15 09:29:58 +0900	volume	text	unknown	English	9780852968598	""			BA25954059										xiv, 335 p. ; 29 cm	1	335		29.0					Guest			""	""	""	""	""	""	""	""	""	""	66889	EMIS datareviews series	""	""	""	""	no. 14	""	""	40681	13876	""	2024-11-28 21:09:26 +0900	2025-11-28 13:04:07 +0900	""	""	""	""	""	537.311	42030	217436		537.311|W|14	namiki	N00090202	""		1997-04-10 00:00:00 +0900	2010-12-15 23:44:24 +0900	2025-12-15 09:29:58 +0900