manifestation_id original_title title_alternative title_transcription statement_of_responsibility serial manifestation_identifier creator contributor publisher date_of_publication year_of_publication publication_place manifestation_created_at manifestation_updated_at carrier_type content_type frequency language isbn issn ncid volume_number volume_number_string edition edition_string issue_number issue_number_string serial_number extent start_page end_page dimensions height width depth manifestation_price access_address manifestation_required_role abstract description identifier:unknown identifier:nbn identifier:isbn10 identifier:iss_itemno identifier:online_isbn identifier:print_isbn identifier:print_issn identifier:online_issn identifier:escidoc identifier:nims series_statement_id series_statement_original_title series_statement_title_subseries series_statement_title_subseries_transcription series_statement_title_transcription series_statement_creator series_statement_volume_number series_statement_series_master series_statement_root_manifestation_id series_statement_manifestation_id series_statement_position series_statement_note series_statement_created_at series_statement_updated_at subject:ndlsh subject:unknown subject:bsh classification:ndc8 classification:ndc9 classification:udc doi jpno ncid lccn iss_itemno item_id item_identifier binding_item_identifier call_number library shelf item_note accepted_at acquired_at item_created_at item_updated_at 40593 IC,LSIプロセスにおける薄膜の生成加工 IC,LSI プロセス ニ オケル ハクマク ノ セイセイ カコウ 24498 國岡昭夫 [ほか] "" トリケップス 1982-01-01 00:00:00 +0900 1901-01-01 09:00:00 +0900 2011-04-02 16:28:40 +0900 volume text unknown Japanese "" "" No.86 26 1 26.0 Guest "" "" "" "" "" "" "" "" "" "" 925 トリケップス技術資料集 "" "" "" "" "" "" "" 40593 512 "" 2011-03-30 23:55:16 +0900 2013-04-22 23:54:22 +0900 "" "" "" "" "" 621.38 42104 204314 621.38|K|7080 sengen S00110401 1982-03-31 00:00:00 +0900 2010-12-15 23:44:45 +0900 2010-12-15 23:44:45 +0900