manifestation_id	original_title	title_alternative	title_transcription	statement_of_responsibility	serial	manifestation_identifier	creator	contributor	publisher	date_of_publication	year_of_publication	publication_place	manifestation_created_at	manifestation_updated_at	carrier_type	content_type	frequency	language	isbn	issn	ncid	volume_number	volume_number_string	edition	edition_string	issue_number	issue_number_string	serial_number	extent	start_page	end_page	dimensions	height	width	depth	manifestation_price	access_address	manifestation_required_role	abstract	description	identifier:unknown	identifier:nbn	identifier:isbn10	identifier:iss_itemno	identifier:online_isbn	identifier:print_isbn	identifier:print_issn	identifier:online_issn	identifier:escidoc	identifier:nims	series_statement_id	series_statement_original_title	series_statement_title_subseries	series_statement_title_subseries_transcription	series_statement_title_transcription	series_statement_creator	series_statement_volume_number	series_statement_series_master	series_statement_root_manifestation_id	series_statement_manifestation_id	series_statement_position	series_statement_note	series_statement_created_at	series_statement_updated_at	subject:ndlsh	subject:unknown	subject:bsh	classification:ndc8	classification:ndc9	classification:udc	doi	jpno	ncid	lccn	iss_itemno	item_id	item_identifier	binding_item_identifier	call_number	library	shelf	item_note	accepted_at	acquired_at	item_created_at	item_updated_at
73714	LSI製造におけるプロセス高性能化技術 : ガス供給システム  第1編		LSI セイゾウ ニオ ケル プロセス コウセイノウ ケ ギジュツ:ガス キョウキュウ システム  			920419	半導体基盤技術研究会 編; [大見 忠弘, 新田 雄久 監修]	半導体基盤技術研究会 編; [大見 忠弘, 新田 雄久 監修]//半導体基盤技術研究会	リアライズ社	1989-01-01 00:00:00 +0900			2006-11-07 00:26:12 +0900	2024-03-04 14:01:38 +0900	volume	text	unknown	Japanese	""	""			Technology						224p; 27cm	1	224		27.0					Guest			""	""	""	""	""	""	""	""	""	""	139	Ultra Clean Technology	""	""	""	""	""	""	""	73714	77	""	2011-03-30 23:49:13 +0900	2013-04-23 00:04:45 +0900	""	""	""	""	""	661.9						74072	210874		661.9|H|12350	sengen	S00130202			2006-12-01 00:00:00 +0900	2010-12-16 02:30:38 +0900	2024-03-04 14:01:38 +0900
42342	超高純度ガス供給システム		チョウ コウ ジュンド ガス キョウキュウ システム  			26673	半導体基盤技術研究会	""	リアライズ社	1986-01-01 00:00:00 +0900			1901-01-01 09:00:00 +0900	2023-02-24 17:03:10 +0900	volume	text	unknown	Japanese	""	""									463p; 27cm	1	463		27.0					Guest			""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	""	661.9						44042	206501		661.9|H|8283	sengen	S00130202			1988-03-17 00:00:00 +0900	2010-12-15 23:54:06 +0900	2023-02-24 17:03:10 +0900