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40270	Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.		  	editors, Erin C. Jones ... [et al.]	67973	Jones, Erin C.//Jones, Kevin S.//Giles, Martin D.//Stolk, Peter//Matsuo, Jiro	""	Materials Research Society		2001			2002-05-02 19:56:01 +0900	2025-12-03 16:34:44 +0900	volume	text	unknown	English	9781558996052	""			BA56818510										1 v. ; 24 cm	1			24.0					Guest			""	""	""	""	""	""	""	""	""	""	71717	Materials Research Society symposium proceedings	""	""	""	""	v. 669	""	""	40270	18656	""	2024-11-28 22:05:12 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	41731	219169		MRS|P|669	namiki	N10600206			2002-05-15 00:00:00 +0900	2010-12-15 23:43:00 +0900	2025-12-03 16:34:44 +0900