manifestation_id original_title title_alternative title_transcription statement_of_responsibility manifestation_identifier creator contributor publisher date_of_publication pub_date year_of_publication publication_place manifestation_created_at manifestation_updated_at carrier_type content_type frequency language isbn issn doi jpno ncid lccn iss_itemno volume_number volume_number_string edition edition_string issue_number issue_number_string serial_number extent start_page end_page dimensions height width depth manifestation_price access_address manifestation_required_role abstract description identifier:unknown identifier:nbn identifier:isbn10 identifier:iss_itemno identifier:online_isbn identifier:print_isbn identifier:print_issn identifier:online_issn identifier:escidoc identifier:nims series_statement_id series_statement_original_title series_statement_title_subseries series_statement_title_subseries_transcription series_statement_title_transcription series_statement_creator series_statement_volume_number series_statement_series_master series_statement_root_manifestation_id series_statement_manifestation_id series_statement_position series_statement_note series_statement_created_at series_statement_updated_at subject:ndlsh subject:unknown subject:bsh classification:ndc8 classification:ndc9 classification:udc item_id item_identifier binding_item_identifier call_number library shelf item_note accepted_at acquired_at item_created_at item_updated_at 132419 Chemical physics of thin film deposition processes for micro- and nano-technologies Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001 "" edited by Yves Pauleau Pauleau, Y. "" Kluwer Academic 2002-01-01 00:00:00 +0900 2002 2002 Dordrecht 2024-01-16 11:19:49 +0900 2024-01-29 10:56:38 +0900 volume unknown English 9781402005251 "" BA57112551 xiii, 363 p. ; 25 cm Guest "" "" "" "" "" "" "" "" "" "" 31678 NATO science series, Sub-series II, Mathematics, physics and chemistry "" "" "" "" v. 55 "" "" 132419 9130 "" 2024-01-16 12:00:47 +0900 2024-10-31 14:38:18 +0900 "" "" "" "" "" 539.216 102903 602722 539.216|P| sengen S00050205 2016-01-21 00:00:00 +0900 2024-01-16 11:19:49 +0900 2024-01-29 10:56:38 +0900 123726 Materials Surface Processing by Directed Energy Techniques "" "" Pauleau, Y.-European Materials Research Society. "" "" Elsevier Ltd. 2006-01-01 00:00:00 +0900 2006 2006 2019-04-26 17:56:03 +0900 2019-04-26 17:56:03 +0900 online_resource text unknown unknown 9780080458960 "" http://www.netLibrary.com/urlapi.asp?action=summary&v=1&bookid=166599 Guest "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" "" ""