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5328	Ion implantation technology : proceedings of the Seventh International Conference on Ion Implantation Technology, Kyoto, Japan, June 7-10, 1988	Ion implantation technology 7	  	edited under the responsibility of T. Takagi ... [et al.]	65723	International Conference on Ion Implantation Technology (7th : 1988 : Kyoto, Japan)//Takagi, T.	""	North-Holland		1989	1989		2001-07-13 03:57:56 +0900	2025-12-15 09:31:56 +0900	volume	text	unknown	English	""	""			BA36830910										xx, 994 p. ; 27 cm	1	994		26.0					Guest			""	""	""	""	""	""	""	""	""	""	63119	Nuclear instruments & methods in physics research	""	""	""	""	Section B. Beam interactions with materials and atoms ; v.37-38	""	""	5328	10515	""	2024-11-28 20:34:35 +0900	2025-11-13 10:48:20 +0900	""	""	""	""	""	539.1	5787	525043		539.1||	namiki	N00100504			1990-12-13 00:00:00 +0900	2010-12-15 20:41:46 +0900	2025-12-15 09:31:56 +0900