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40473	Chemical-mechanical polishing 2001 -- advances and future challenges : symposium held April 18-20, 2001, San Francisco, California, U.S.A.		  	editors, Suryadevara V. Babu ... [et al.]	67974	Babu, Suryadevara V.//Cadien, Kenneth C.//Yano, Hiroyuki	""	Materials Research Society		2001			2002-05-02 20:05:06 +0900	2025-12-03 16:34:44 +0900	volume	text	unknown	English	9781558996076	""			BA56818816										1 v. ; 24 cm	1			24.0					Guest			""	""	""	""	""	""	""	""	""	""	71718	Materials Research Society symposium proceedings	""	""	""	""	v. 671	""	""	40473	18657	""	2024-11-28 22:05:12 +0900	2025-11-28 13:05:58 +0900	""	""	""	""	""	MRS	41799	219170		MRS|P|671	namiki	N10600206			2002-05-15 00:00:00 +0900	2010-12-15 23:43:19 +0900	2025-12-03 16:34:44 +0900