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[M] Reactive Sputter Deposition 109 オンラインリソース

Author: Diederik Depla, Stijn Mahieu Publisher: Springer Berlin Heidelberg (Date of publication: 2008)

Series statement:
  • Springer Series in Materials Science Springer Series in Materials Science
Edition:
Number: Volume number: 109
Form: オンラインリソース オンラインリソース
言語: English
Physical description:
Subject:
Classification:
Identifier: ISBN: 9783540766643
Abstract:

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