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ULSI Semiconductor Technology Atlas 
Creator: Chih-Hang Tung George T. T. Sheng Chih-Yuan Lu
https://onlinelibrary.wiley.com/doi/book/10.1002/0471668796 
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Online resource
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ISBN: 9780471457725 9780471668794
DOI: 10.1002/0471668796
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