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MEMS : introduction and fundamentals
edited by Mohamed Gad-el-Hak
Creator: Gad-el-Hak, Mohamed Publisher: CRC, Taylor & Francis
(Date of publication: 2006)
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Language: | English |
Physical description: | 1 v. (various pagings) ; 26 cm |
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ISBN: 9780849391378
NCID: BA75369742
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The MEMS handbook, 2nd ed
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