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Fundamentals of Microfabrication and Nanotechnology Three-Volume Set 
Marc J. Madou
Creator:
Madou, Marc J. Publisher:
CRC Press
(Date of publication:
2011)
https://doi.org/10.1201/9781315274164 
| Edition: | Third Edition |
|---|---|
| Number: | Volume number: Three-Volume Set |
| Form: |
Online resource
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| Language: | English |
| Physical description: | Vol 1: xv, 630 p., Vol 2: xiii, 642 p., Vol 3: xiii, 626 p. |
| Subject: | |
| Classification: | |
| Tag: |
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| Identifier: |
ISBN: 9781315274164
NCID: BB06582045
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| Abstract: | |
| Note: |
Three-Volume Set, Vol 1: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology, Vol 2: Manufacturing techniques for microfabrication and nanotechnology, Vol 3: From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications |