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Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A. 
editors, Erin C. Jones ... [et al.]
Creator: Jones, Erin C. Jones, Kevin S. Giles, Martin D. Stolk, Peter Matsuo, Jiro Publisher: Materials Research Society (Date of publication: 2001)
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Volume
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| Language: | English |
| Physical description: | 1 v. ; 24 cm |
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ISBN: 9781558996052
NCID: BA56818510
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 219169 | Namiki |
Journal Archives 60 
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MRS|P|669 | Available On Shelf |