[M] 次世代ＵＬＳＩ多層配線の新素材・プロセス技術

Creator: 吉川公麿 [監修] Publisher: 技術情報協会 (Date of publication: 2000)

• Detail

Form:	Volume
Language:	Japanese
Physical description:	383p; 27cm
Subject:
Classification:	UDC: 621.382
Tag:
Identifier:	ISBN: 9784906317271
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218846	Sengen	Books 11	621.382|Y|11481	Available On Shelf

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