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Si Front-End Processing - Physics and Technology of Dopant-Defect Interactions Ⅱ: Symposium held April 24-27, 2000, San Francisco, California, U.S.A. ; MRS Vol.610 Vol.610 Vol.610 
Creator: editors； Aditya Agarwal, Lourdes Pelaz, Hong-Ha Vuong [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2001)
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| Number: | Volume number: Vol.610 |
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Volume
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| Language: | English |
| Physical description: | 24 |
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| Identifier: | ISBN: 9781558995185 ISSN: 02729172 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218934 | Sengen |
Proceedings 26 
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MRS|P|11505 | Available On Shelf |