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Chemical-Mechanical Planarization : Symposium held April 22-24, 2003, San Francisco, California, U.S.A. ; MRS Vol.767 Vol.767 Vol.767 
Creator: editors；Duane S. Boning, Katia Devriendt, Michael R. Oliver [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2003)
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| Number: | Volume number: Vol.767 |
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Volume
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| Language: | English |
| Physical description: | 348p; 24cm ; 24.0 cm. |
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| Identifier: | ISBN: 9781558997042 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 219522 | Sengen |
Proceedings 26 
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MRS|P|11936 | Available On Shelf |