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[M] Journal of Vacuum Science & Technology Vol.13 No.4-6 / No.4 ; 3rd Annual Conference on the Physics of Compound Semiconductor Interfaces / No.5 ; Proceedings of the Symposium on Advances in Ion Technology Vol.13 No.4-6
Publisher: for The American Vacuum Society by the American Institute of Physics
(Date of publication: 1976)
Periodical: | Journal of Vacuum Science & Technology |
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Number: | Volume number: Vol.13 Issue number: No.4-6 |
Form: | Volume |
Language: | English |
Physical description: | 751p; 29cm |
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Identifier: | ISSN: 00225355 |
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Item identifier | Library | Shelf | Call number | Circulation status |
---|---|---|---|---|
120459 | Sengen | Journal Archives | |J|T-1363 |
Available On Shelf Not For Loan |