資料の表示
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Journal of Vacuum Science & Technology Vol.14 No.1-2 / No.1 ; Proceedings of the 23rd National Symposium of the American Vacuum Society, 21-24 September 1976Palmer House Chicago, Illinois Vol.14 No.1-2 
出版者: for The American Vacuum Society by the American Institute of Physics (出版日: 1977)
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| 巻号: | 巻: Vol.14 号: No.1-2 |
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| 言語: | English |
| ページ数と大きさ: | 1p; 29cm |
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| 識別子: | ISSN: 00225355 |
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